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| 020 |
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|a 0201146959
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| 090 |
0 |
0 |
|a TK7874
|b .J33 1988
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| 100 |
1 |
|
|a Jaeger, Richard C.
|
| 245 |
1 |
0 |
|a Introduction to microelectronic fabrication /
|c Richard C. Jaeger.
|
| 260 |
|
|
|a Reading, Mass.:
|b Addison-Wesley Pub. Co.,
|c 1988.
|
| 300 |
|
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|a xiii, 232 p.:
|b ill.;
|c 24 cm.
|
| 440 |
|
0 |
|a Modular series on solid state devices;
|v v. 5
|
| 504 |
|
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|a Includes bibliographical references and index.
|
| 650 |
|
0 |
|a Integrated circuits --
|x Very large scale integration --
|x Design and construction --
|x Textbooks.
|
| 999 |
|
|
|a 0000002812
|b Book
|c Open Shelf
|e Perpustakaan CIAST
|
