Introduction to microelectronic fabrication /
| Main Author: | |
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| Format: | Book |
| Published: |
Reading, Mass.:
Addison-Wesley Pub. Co.,
1988.
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| Series: | Modular series on solid state devices;
v. 5 |
| Subjects: |
| Physical Description: | xiii, 232 p.: ill.; 24 cm. |
|---|---|
| Bibliography: | Includes bibliographical references and index. |
| ISBN: | 0201146959 |