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00711cam a2200193 7i4500 |
| 001 |
0000002063 |
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20130917090000.0 |
| 020 |
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|a 0824758242 (alk. paper)
|
| 090 |
0 |
0 |
|a TK153
|b .A47 2005
|
| 100 |
1 |
|
|a Allen, James J.
|
| 245 |
1 |
0 |
|a Micro electro mechanical system design /
|c James J. Allen.
|
| 260 |
|
|
|a Boca Raton:
|b Taylor & Francis,
|c 2005.
|
| 300 |
|
|
|a 465 p.:
|b ill.;
|c 23 cm.
|
| 490 |
|
|
|a Mechanical engineering;
|v 192
|
| 504 |
|
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|a Includes bibliographical references and index.
|
| 650 |
|
0 |
|a Microelectromechanical systems --
|x Design and construction.
|
| 650 |
|
0 |
|a Engineering design.
|
| 830 |
|
0 |
|a Mechanical engineering (Taylor & Francis) ;192.
|
| 999 |
|
|
|a 0000002581
|b Book
|c Open Shelf
|e Perpustakaan CIAST
|
