Micro electro mechanical system design /
| Main Author: | |
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| Format: | Book |
| Published: |
Boca Raton:
Taylor & Francis,
2005.
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| Series: | Mechanical engineering (Taylor & Francis) ;192.
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| Subjects: |
| Physical Description: | 465 p.: ill.; 23 cm. |
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| Bibliography: | Includes bibliographical references and index. |
| ISBN: | 0824758242 (alk. paper) |