Description: Integrated circuit fabrication technology /

Bibliographic Details
Main Author:	Elliott, David J.
Format:	Book
Published:	New York: McGraw-Hill, 1989.
Edition:	2nd ed.
Subjects:	Integrated circuits -- > Design and construction.

Description
Physical Description:	xvi, 540 p.: ill.; 24 cm.
Bibliography:	Includes bibliographies and index.
ISBN:	0070193398